A Parylene Bellows Electrochemical Actuator

A MEMS electrochemical bellows actuator for fluid metering applications.

We present a high efficiency wireless MEMS electrochemical bellows actuator capable of rapid and repeatable delivery of boluses for fluid metering and drug delivery applications. Nafion®-coated Pt electrodes were combined with Parylene bellows filled with DI water to form the electrolysis-based actuator. The performance of actuators with several bellows configurations was compared for a range o...

Electrochemical Characterization of a 3d Parylene Sheath Cortical Probe

We developed a 3D Parylene sheath cortical probe for the purpose of advancing neuronal recording reliability and longevity. Our approach is to improve probe-tissue integration through a unique 3D open-lumen probe structure and the application of biofunctional coatings to mitigate adverse immune reactions and promote neuronal growth. We present the use of electrochemical (EC) testing to confirm ...

Rapid fabrication and characterization of MEMS Parylene C bellows for large deflection applications

We present a rapid, high-yield fabrication process for Parylene C microbellows for large deflection applications and their characterization. Bellows having different convolution number, wall thickness, inner diameter and outer diameter and layer height were fabricated using a lost wax-like process. The effect of design parameters on overall bellows performance was evaluated through load–deflect...

Electrochemical characterization of parylene-embedded carbon nanotube nanoelectrode arrays.

A novel parylene-embedded carbon nanotube nanoelectrode array is presented for use as an electrochemical detector working electrode material. The fabrication process is compatible with standard microfluidic and other MEMS processing without requiring chemical mechanical polishing. Electrochemical studies of the nanoelectrodes showed that they perform comparably to platinum. Electrochemical pret...

3D Force Control System Design for A Hydraulic Parallel Bellows Continuum Actuator